隨著光電科技的發展，光學技術應用於各個領域之重要性也與日俱增。本課程將從基本的光學原理出發，詳細介紹幾種光學應用的領域，包括奈米及光學微影、薄膜光學、奈米光學技術等。並將介紹其在奈米材料、半導體製程與生物科技上的應用等。
課程內容：
1. Basic theory: Maxwell’s equations and electromagnetic waves
2. Geomtric optics and optical systems
3. Wave optics and multiple beam interference
4. Diffraction optics
5. Resolution enhancement techniques for nano-scale optical lithography: modified illumination, optical proximity correction, and attenuated phase shifting masks
6. Optical thin film design, fabrication, and applications
7. Optical measurement for thin films and bio-technology
8. Nanophotonics: nanomaterials, plasmonics, photonic crystals, and near-field technologies

參考書籍：
1. Eugene Hecht, Alfred Zajac, Optics, ADDISON-WESLEY(1998)
2. Grant R. Fowles, “Introduction to modern optics” Holt, Rinehart and Winston Inc. Press.
3. A. K. Wang, “Resolution enhancement techniques” The International Society for Optical Engineering (SPIE) published (2001)
4. Paras N. Prasad, “Nanophotonic” Wiley-Interscience (2004)
5. H.A. Macleod, Thin Film Optical Filters by, Institute of Physics Pub. (2001)
6. Jing Cheng, Larry J. Kricka, Biochip Technology, Harwood academic publishers (2001)
7. Related Journals and Conference Proceedings

教學進度：
約每兩週一個單元

教學方式：投影片與參考書籍